Invensys【英維斯】 Triconex: 冗余容錯控制系統(tǒng)、基于三重模件冗余（TMR）結(jié)構(gòu)的最現(xiàn)代化的容錯控制器。
ASML SERV.502.27711 / 4022.436.22831 - DEMODULATOR ALIGNMENT BOARD
ASML SERV.502.27961 / 4022.454.15271 - ENERGY SENSOR 2
ASML SERV.502.29097 / 4022.436.38491 - IIB UV V2 BOARD
ASML SERV.502.29097 / 4022.436.38492 REV.B - IIB UV V2 BOARD
ASML SERV.502.29288 - HINDS CONTROL STEPPERS BOARD
AXCELIS 398131 - FRONT SCREEN
IPEC 0150-700184 / SS2000D6 - DRIVER, STEP MOTOR PAD CONDITIONER
SURFSCAN 6420 311987 / 271993 - FOCUS ASSY, W/CCM, S6420
SURFSCAN 7700 186970 - FLEX LEAD CABLE ASSY
SVG/THERMCO/AVI?ZA 601192-05 REV.B - HEATER JACKETS CONTROLLER
SVG/THERMCO/AVI?ZA 161460-006 REV A - GAS DAUGHTER BOARD
SVG/THERMCO/AVI?ZA 990VZ081 / 61403-018 REV.1 - DIFV04 GAS MOTHER BD
SET OF 6 STRAP FILAMENT (sce pi/qt/xr)- PN 0020-86731
ASML SERV.430.123521 / 4022.430.123521 - LASER CONTROL BOARD
ASML SERV.435.05571 / 4022.435.05571 - INTEGRATOR BLOCK /60
ASML SERV.436.33245 / 4022.436.33245 - LASER CONTROL BOARD
ASML SERV.454.15721 / 1165378221/181 - INTERFERENCE FILTER /60/80/100
ASML SERV.454.52702 - LAMP HOLDER, 1500 W
ASML SERV.502.28764 / 4022.435.66381 - INTEGRATOR BLOCK /100+/22
ASML SERV.502.28999 / 4022.454.19301 - LEFT ALIGNMENT BRANCH
surFSCAN 7700 187410 - LIFT ACTUATOR ASSY, FFM HDLR2
ASML?7122.714.1?1012 / PHILIPS - 100 W SERVO AMPLIFIER
ASML?SERV.435.0?9323 - AIRFOOT SET OF 3
ASML?SERV.435.6?7961 / 1135 P - ALIGNM. LASER + SHUTTER
ASML?SERV.454.2?0391 / 846HP - AL.SHUTTER + INTERMEDIATE PLATE
IPC3000 95-3531 / 95-2886 - ASSY, SECS/GEM, SERIAL, COM 3 & 4
IPC3000 95-2886 / 005382 REV C - ASSY, SECS/GEM, SERIAL, COM 3 & 4
SURFSCAN 6420 156663 - ASSY, SHUTTER RT, S6200
AMAT 0100-09146 REV.B - CENTERFINDER BOARD
AMAT 0100-11002 - DI/DO
ASML 4022.502.35003 / 7122.714.12005 - DICM01 DIGITAL CONTROL CARD (x4)
ASML SERV.436.37091 / 4022.436.37091 / 511-33610 - BLADE DRIVER BOARD
400-6352-900
