| 內(nèi)容 |
日本ULVAC在提供各種真空設(shè)備的同時(shí)，還提供各種真空泵，真空計(jì)測(cè)，氦氣質(zhì)樸檢漏儀等各種真空配套設(shè)備。同時(shí)提供優(yōu)良的售后服務(wù)。低溫泵也是優(yōu)勢(shì)產(chǎn)品之一。 |
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| 型號(hào) |
PMB-001C,CM |
PMB-003C,CM |
PRC-003A |
PRC-006A |
| 排氣速度 |
50Hz |
95 |
280 |
280 |
500 |
| (m3/h(L/min)) (*1) |
(1580) |
(4670) |
(4670) |
(8330) |
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60Hz |
115 |
330 |
330 |
600 |
| |
(1920) |
(5500) |
(5500) |
(10000) |
| 吸氣口最大壓力 |
50Hz |
9.3
x 103 |
1.2 x 103 |
1.3
x 103 |
| (Pa; PMB-C only)(*2) |
60Hz |
6.2
x 103 |
9.3 x 103 |
1.1
x 103 |
| 最大容許壓力 |
50Hz |
8.0
x 103 |
4.0 x 103 |
7.3
x 103 |
| (Pa; PMB-C only)(*2) |
60Hz |
5.6 x 103 |
3.3 x 103 |
6.0 x 103 |
| 到達(dá)壓力 (Pa) (*3) |
4.0 x 10-1 |
| 驅(qū)動(dòng)壓力(Pa) |
to 1.0 x 105 (PRC-A,PMB-CM) |
| 功率 (kW) |
0.4(2) |
0.75(2) |
2.2(2) |
| (number of poles) (*5) |
| 油 (*6) |
ULVOIL R-4 |
| 油量(L) |
0.35 |
0.7 |
1.5 |
| 冷卻水 |
Cooling method |
Air-cooled |
Air-cooled,
water-cooled |
Water-cooled |
| Primary pressure |
- |
0.3 |
| (MPa) |
| Outlet/inlet differential |
- |
0.05 |
0.01 |
| pressure |
| (MPa) |
| Flow rate |
- |
2 |
| (l/min) |
| Temperature |
- |
5 to 30 |
| (oC) |
| 入口尺寸 |
VG50 size |
VG80 size |
VG100 size |
| (JIS B 2290) |
| 出口尺寸 |
VF50 size |
VF80 size |
| (JIS B 2290) |
| 外形尺寸 |
271 x 580 x 180 |
290 x 656 x 260 |
296 x 565 x 260 |
356 x 619 x 320 |
| (L x W x H; mm) |
| 重量 (kg) (*8) |
23(24) |
46(48) |
51(54) |
86(90) |
| 標(biāo)準(zhǔn)輔助泵 |
VD401 |
VD601 |
VD901 |
| 選配 |
- |
1.5 kW motors (2) |
Atmospheric |
| pressure drive type |
| Lubrication chamber |
| evacuation support |
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| 型號(hào) |
PRC-012A |
PMB-024C,CM |
PMB-040C |
PMB-060C |
| 排氣速度 |
50Hz |
1000 |
2000 |
3800 |
6200 |
| (m3/h (l/min)) (*1) |
(16700) |
(33300) |
(63300) |
(103300) |
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60Hz |
1200 |
2400 |
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(20000) |
(40000) |
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| 最大吸氣壓力 |
50Hz |
1.3
x 103 |
8.0
x 102 |
8.0 x 102 |
| (Pa; PMB-C only) (*2) |
60Hz |
1.1
x 103 |
6.7
x 102 |
| 最大容許壓力 (Pa; PMB-C only) (*2) |
50Hz |
7.3
x 103 |
5.6
x 103 |
- |
- |
| 60Hz |
6.0
x 103 |
4.7
x 103 |
| 到達(dá)壓力 (Pa) (*3) |
6.7 x 10-1 |
| 支持驅(qū)動(dòng)壓力 (Pa) (*4) |
to 1.0 x 105 (PRC-A,PMB-CM) |
| 功率 (kW) (number of poles) (*5) |
3.7(2) |
7.5(2) |
15(4) |
18.5(4) |
| 油 (*6) |
ULVOIL R-4 |
ULVOIL R-7 |
| 油量 (L) (*7) |
1.9 |
4.0(2.2) |
8 |
| 冷卻水 |
Cooling method |
Water-cooling |
| Primary pressure (MPa) |
0.3 |
0.1
to 0.3 |
| Outlet/inlet differential
pressure (MPa) |
0.01 |
0.05 |
| Flow rate (L/min) |
3 |
10 |
| Temperature (oC) |
5 to 30 |
| 吸氣口尺寸 (JIS B 2290) |
VG100
size |
VG200
size |
VG250
size |
VG300
size |
| 排氣口尺寸 (JIS B 2290) |
VF80
size |
VF200
size |
VF150
size |
VF200
size |
| 外形尺寸 (L x W x H; mm) |
406
x 759 x 340 |
540
x 1237 x 470 |
764
x 1230 x 707 |
764
x 1470 x 707 |
| 重量 (kg) (*8) (*9) |
118(123) |
260(272) |
970 |
1100 |
| (without motor) |
(without motor) |
| 標(biāo)準(zhǔn)輔助泵 |
VS1501 |
PKS-070 |
PKS-070
x 2 |
| 選配 |
Atmospheric
pressure drive type |
11
kW motors (2) |
- |
| Lubrication chamber evacuation
support |
- |
- |
